Varadan Vijay K., Jiang Xiaoning, Varadan V.V.:
Microstereolithography
And Other Fabrication Techniques For 3D Mems
John Wiley And Sons Ltd (United Kingdom), 2001
Hardback, 274 pages
Size: 225x172 mm
ISBN: 9780471521853
ISBN-10: 047152185X
Price: £105.00
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Microstereolithography
Focusing on microstereolithography and other microfabrication for 3D MEMS, this volume discusses the principles of microstereolithography for fabrication of 3D MEMS devices. It provides an account of the developments in related microfabrication and combined architecture techniques, illustrating their application in the engineering field.

